The Effect of Reactive Sputtering on the Microstructure of Parylene-C.

Materials (Basel) · 2022 · PMC9369700 · PMID 35955139

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a decreasing trendno p-value reported

Due to increased thickness with respect to the sputtering time of AlN films deposited on parylene-C and the quartz substrate, a decreasing trend in the transmittance was expected [ 18 ].

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