Memory Effects in Nanolaminates of Hafnium and Iron Oxide Films Structured by Atomic Layer Deposition.

Nanomaterials (Basel) · 2022 · PMC9370642 · PMID 35957028

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closest p

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almost insignificantno p-value reported

Further and notably, after 500 ALD cycles, the metastable phases, if initially formed and present in HfO 2 films, were already almost insignificant in the diffraction patterns.

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