Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices.

Micromachines (Basel) · 2022 · PMC9609663 · PMID 36295996

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a decreasing trendno p-value reported

It can be seen from Figure 4 that the positive and negative resonant frequencies generated by the four electrode materials show a decreasing trend with the increase in the piezoelectric substrate thickness, and the decreasing trend is basically the same.

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