Crystallinity Effect on Electrical Properties of PEALD-HfO<sub>2</sub> Thin Films Prepared by Different Substrate Temperatures.

Nanomaterials (Basel) · 2022 · PMC9656191 · PMID 36364666

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a decreasing trendno p-value reported

The carbon atomic ratio in HfO 2 film has a decreasing trend except for the film deposited at a temperature of 450 °C.

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