From Figure 11 b, the nonlinearity has presented an increasing trend with the increase in the preload, and the shift in the resonant frequency is the greatest. compared to the excitation voltage effect on the mechanical output of the system, a higher preload has led to a significant increase in the vibration amplitude, as shown in Figure 12 .
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A Design Method of Traveling Wave Rotary Ultrasonic Motors Driving Circuit under High Voltage Using Single-Sided Hertzian Contact Forced Oscillator Model.
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