Investigation of V/III ratio dependencies for optimizing AlN growth during reduced parasitic reaction in metalorganic vapor phase epitaxy.

Sci Rep · 2023 · PMC9969028 · PMID 36849503

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a decreasing trendno p-value reported

The V/III ratio-dependent results in this study show a decreasing trend, contrary to a previous study in which the FWHM increased significantly with increasing V/III ratio 13 .

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