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Improving Etched Flatness by Micro Airflow Array Pressurization in ITO Glass Laser Machining.

Micromachines (Basel) · 2023 · PMC10056328 · PMID 36985083

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showed a trendno p-value reported
The airflow pressure and etching gap showed a trend of first decreasing and then increasing with respect to the workpiece flatness.

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Quoted from the open-access full text in Europe PMC under the licence the publisher applied. The sentence is reproduced exactly as published; the emphasis is ours.