Optical Properties in Mid-Infrared Range of Silicon Oxide Thin Films with Different Stoichiometries.

Nanomaterials (Basel) · 2023 · PMC10609603 · PMID 37887900

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a clear trendno p-value reported

A clear trend can be observed as the O 2 flow increased, and this series of samples demonstrated the excellent reproducibility of the deposition process and the precise control of O 2 flow achieved through the MFC.

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