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Atomic Layer Deposition of ScF<sub>3</sub> and Sc<sub><i>x</i></sub>Al<sub><i>y</i></sub>F<sub><i>z</i></sub> Thin Films.

ACS Omega · 2024 · PMC10938443 · PMID 38496930

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a clear trendno p-value reported
14 , 15 Interestingly, there was a clear trend in the erosion rates of the measured ScF 3 films.

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