Comprehensive Review on the Impact of Chemical Composition, Plasma Treatment, and Vacuum Ultraviolet (VUV) Irradiation on the Electrical Properties of Organosilicate Films.

Polymers (Basel) · 2024 · PMC11314954 · PMID 39125256

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a clear trendno p-value reported

Figure 22 displays the relationship between the characteristic lifetimes of various low- k dielectrics plotted against the applied electric field, revealing a clear trend of lower breakdown performance with decreasing k value.

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