Sq was reduced from 25 nm to 13 nm after the introduction of vibration, and Sq did not show a significant trend of reduction or even increase without vibration-assisted polishing.
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Design, Testing, and Experimental Validation of a Rotary Vibration-Assisted Polishing Device (RVAPD) for Enhanced Machining and Surface Quality.
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The sentences
The polishing tangential force exhibited an increasing trend following the application of vibration.