One-Step Fabrication of 2.5D CuMoO<sub>x</sub> Interdigital Microelectrodes Using Numerically Controlled Electric Discharge Machining for Coplanar Micro-Supercapacitors.

Micromachines (Basel) · 2024 · PMC11596134 · PMID 39597131

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As the machining voltage increases to 80 V, the CuMoO x particles showed a trend of agglomerations and sparse distribution ( Figure 5 b).

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