Homogeneity of Electro-Mechanical and Optical Characteristics in Ring-Shaped MEMS Shutter Arrays with Subfield Addressing for Interference Microscopy.

Micromachines (Basel) · 2025 · PMC11857769 · PMID 40047639

Europe PMC DOI

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a clear trendno p-value reported

Despite the consistent behaviour of the different zones observed, the rings showed a clear trend of slightly increasing closing threshold (up to 7%) with increasing radial position.

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