High-Performance Piezoelectric Micro Diaphragm Hydrogen Sensor.

ACS Sens · 2025 · PMC11959592 · PMID 40081402

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a clear trendno p-value reported

The results reveal a clear trend in sensitivity: the R50% device with a 120 nm Pd layer exhibited the highest sensitivity at 20.2 kHz per 600 MPa (equivalent to 20.2 kHz/% H 2 ), while the R70% device with a 40 nm Pd layer showed the lowest sensitivity at 7.7 kHz per 600 MPa (7.7 kHz/% H 2 ).

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