Temperature-Dependent {111}-Texture Transfer to Hf0.5Zr0.5O2 Films from {111}-Textured TiN Electrode and Its Impact on Ferroelectricity.

ACS Appl Mater Interfaces · 2025 · PMC12067369 · PMID 40153518

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showed a trendno p-value reported

Figure 5 d shows the E c values extracted from the hysteresis curves measured in Figure 5 a,b, which showed a trend to increase with the deposition temperature.

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Temperature-Dependent {111}-Texture Transfer to Hf&lt;sub&gt;0.5&lt;/sub&gt;Zr&lt;sub&gt;0.5&lt;/sub&gt;O&lt;sub&gt;2&lt;/sub&gt; Films from {111}-Textured TiN Electrode and Its Impact on Ferroelectricity.

The sentences

Temperature-Dependent {111}-Texture Transfer to Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub> Films from {111}-Textured TiN Electrode and Its Impact on Ferroelectricity.