Terahertz MEMS actuators and applications.

Microsyst Nanoeng · 2026 · PMC12949139 · PMID 41760599

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a notable trendno p-value reported

Microchannels fabricated from flexible materials such as PDMS and SU-8 are increasingly being utilized as airflow channels in pneumatic MEMS actuators, marking a notable trend in research.

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a significant trendno p-value reported

The expansion of applications for magnetic drive functional materials represents a significant trend in the development of MEMS actuators.

also in 9,775 other papers

Quoted from the open-access full text in Europe PMC under the licence the publisher applied. The sentence is reproduced exactly as published; the emphasis is ours.