Enhanced electromechanical coupling in piezoelectric MEMS vibration energy harvesters via strain-induced phase transition in Mn-doped bismuth ferrite epitaxial films.

Microsyst Nanoeng · 2026 · PMC12993028 · PMID 41839825

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a clear trendno p-value reported

2b , the c / a ratios were mainly below one, and a clear trend is observed: at substrate temperatures around 420 °C, the c/a ratio approaches one, but gradually decreases as the substrate temperature increases.

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