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Study on the Wear Mechanism of a Diamond AFM Tip During Scribing of a Single-Crystal Silicon.

Micromachines (Basel) · 2026 · PMC13029263 · PMID 41900230

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a clear trendno p-value reported
Crucially, comparing these results with those obtained at the same speed but lower current, a clear trend emerges: elevated bias current intensifies tip degradation, resulting in significantly larger radii across all scribing lengths.

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