Sputter Epitaxy of ZnO Films on Sapphire Substrates Using 3D MgO Buffer Layers.

ACS Omega · 2026 · PMC13425509 · PMID 42540268

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a clear trendno p-value reported

A clear trend was observed, wherein a decrease in T MgO led to an improvement in the crystalline quality of the ZnO films.

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