The Effect of Viscous Air Damping on an Optically Actuated Multilayer MoS₂ Nanomechanical Resonator Using Fabry-Perot Interference.

However, the change of Q factor is quite significant in the limited test frequency ranging from 35 kHz to 75 kHz, which is in contrast to top-down fabricated microelectromechanical systems (MEMS) resonators, such as silicon nitride nanostrings, where a fitted linear relationship is achieved between Q factors from 17 to 600 and resonant frequencies from 7 MHz to 206 MHz by tuning operating pressures at room temperature [ 20 ].

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