Pathways to Tailor Photocatalytic Performance of TiO₂ Thin Films Deposited by Reactive Magnetron Sputtering.

The SEM micrographs of the TiO 2 thin films in the as-grown and heat-treated state indicate a clear trend; a higher oxygen ratio in the reactive atmosphere is reported to result in a lower deposition rate, easier saturation of growing TiO 2 species on the growth front and consequently more pronounced columnar growth.

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