Predicting strength distributions of MEMS structures using flaw size and spatial density.

Microsyst Nanoeng · 2019 · PMC6826048 · PMID 31700670

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a clear trendno p-value reported

In the earlier studies, involving a few tens of specimens per layer, a clear trend in strength, poly4 > poly3 > poly2 > poly1 was observed 11 , 21 , partially motivating the current work.

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