An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process.

Sensors (Basel) · 2020 · PMC7219045 · PMID 32316545

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closest p

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a clear trendno p-value reported

As can be seen from the figure, the DPF calculations have a clear trend, which proves that this function can simulate the changes of amorphous damage.

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