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Effects of TiN Top Electrode Texturing on Ferroelectricity in Hf<sub>1-<i>x</i></sub>Zr<sub><i>x</i></sub>O<sub>2</sub>.

ACS Appl Mater Interfaces · 2021 · PMC8027987 · PMID 33625827

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a clear trendno p-value reported
The similar inclinations of the two reflections allow us to obtain an indication of the preferential grain orientation from the relative peak intensities. A clear trend is observed with increasing chamber pressure.

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