23 This type of Stranski–Krastanov growth typically requires temperatures of ∼550–600 °C, and it can result in quite significant Si/Si 1– x Ge x intermixing at the interface.
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Mixed-Substituted Single-Source Precursors for Si<sub>1-<i>x</i></sub>Ge<sub><i>x</i></sub> Thin Film Deposition.
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