The resistivity of the as-deposited state exhibits a clear trend since the increased P Ar produces low resistivity, which is consistent with the P Ar dependence of the O/Ga ratio identified by the XPS analysis (Fig. 1 f).
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The resistivity of the as-deposited state exhibits a clear trend since the increased P Ar produces low resistivity, which is consistent with the P Ar dependence of the O/Ga ratio identified by the XPS analysis (Fig. 1 f).