Barely Significant

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It is found that the model established by the stepwise method is practically significant with Y = −71.168 + 6.946 x 1 + 25.799 x 3 , where Y , x 1 and x 3 represent the dielectric constant, Nd content and the density, respectively.
The permittivity and interface trap density as well as the breakdown voltage of the three films deposited at different ALD temperatures under a fixed purge time show an increasing trend with increasing temperature, whereas the films’ hysteresis and border trap density show a decreasing trend with increasing temperature.